Surface Characterization and Blood Compatibility of Diamond-Like Carbon (DLC) Films on the NiTi Alloys

Surface Characterization and Blood Compatibility of Diamond-Like Carbon (DLC) Films on the NiTi Alloys

Diamond-like carbon (DLC) films are fabricated on the NiTi alloys at room temperature using plasma immersion ion implantation and deposition (PIIID). The effects of the substrate bias on the characteristics of the DLC films are systematically examined to correlate to the blood compatibility. The results show both the ID=IG ratio (inverse trend in the sp =sp ratio) and the G peak position first ...

Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

Deposition and characterization of ultra thin diamond like carbon films

Amorphous hydrogenated and/or nitrogenated carbon films, a-C:H/a-C:N, in overall thickness up to 2 nm are materials of choice as a mechanical and corrosion protection layer of the magnetic media in modern hard disk drive disks. In order to obtain high density and void-free films the sputtering technology has been replaced by different plasma and ion beam deposition techniques. Hydrocarbon gas p...

Influence of negative voltage on the structure and properties of DLC films deposited on NiTi alloys by PBII

Diamond-like carbon (DLC) films have been successfully deposited on Ti-50.8 at.%Ni using plasma based ion implantation (PBII) technique. The influences of the pulsed negative bias voltage applied to the substrate from 12 kV to 40 kV on the structure, nano-indentation hardness and Young’s modulus are investigated by the X-ray photoelectron spectroscopy (XPS) and nano-indentation technique. The r...

Lithography of diamond-like-carbon (DLC) films for use as masters in soft-lithography

Copyright Statement Copyright 2006 Society of Photo-Optical Instrumentation Engineers. This paper was published in SPIE volume 6037: Device and Process Technologies for Microelectonics, MEMS, and Photonics IV and is made available as an electronic reprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to...